PCTFE (polytetrafluoroethylene) gaskets have become a key sealing material in semiconductor high-purity specialty gas delivery systems due to their excellent chemical inertness, extremely low gas permeability, and ultra-high purity characteristics. The application of PCTFE (polytetrafluoroethylene) gaskets in gas cylinder fittings and pressure reducing valves is mainly due to their excellent performance, including low temperature resistance, high pressure resistance, corrosion resistance, and good sealing.
Typical application case: Sealing of semiconductor special gas cabinets and valve modules
Scenario: Valve connection points of electronic special gas cylinder cabinets (such as NF ∝, SiH ₄ supply systems).
Application: PCTFE Gaskets are used for sealing interfaces of gas cylinder joints, pressure reducing valves, and flow controllers, with good chemical resistance and gas barrier ability, replacing metal gaskets to avoid metal ion pollution.
PCTFE gaskets are a crucial component in ensuring purity and safety in semiconductor specialty gas systems, especially in advanced processes and the transportation of highly toxic gases. With the breakthroughs of domestic manufacturers in material modification (such as composite reinforced PCTFE) and precision machining, its application is expanding from seals to valve membranes, pipeline liners, and other scenarios, becoming the core material supporting the safety of "gas blood vessels" in chip manufacturing.
